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(More customer reviews)This book is a very useful explanation of electron beam metrology fundamentals and techniques. It is very useful as a first introduction to the basics of e-beam technology from an SEM/metrology perspective. Topics such as e-beam optics, detectors, secondary electron emission, voltage contrast etc. are presented very coherently. The focus is on the main conclusion and not on the mathematics leading to the result. In that sense, it is a must read for a beginner to e-beam metrology.
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Primarily intended to be a reference work that draws together in a coherent text both background material and recent developments from numerous publications on, or related to, the subject area. DLC: Semiconductors-Testing.
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